Automatic Residual Gas Analyzer Systems
Next Generation Qualification (NGQ) is the standard system for automatic measurement of outgassing in components and complete assemblies. The system was designed to meet the standards of GSA 07 2221 and GSA 07 9510.
Main specifications
Fully automatic sequence with pass/fail output based on quantitative results (mbar·l/s)
Mass range (standard): 0-200 AMU (optionally 0-300 AMU or 0-512 AMU)
Easy to use, as the system is fully automated
Output report with all details on outgassing
Over 300 systems built worldwide (mostly for the semiconductor and analytical industries)
Options
Various sizes available: from 1 liter to 10,000 liter vacuum chambers
Analyzer: Hiquad / QMG800 system for Grade 1 purposes
Front-loading or top-loading concept
RGA Systems for ASML and its Supply Chain
ASML needed a solution to meet strict outgassing requirements worldwide. We delivered over 300 fully automated and cost-effective RGA systems. These systems comply with ASML standards GSA 07 2221 and GSA 07 9510, combining low outgassing values with a high-vacuum system and user-friendly software. This enables efficient qualification of components and modules, resulting in streamlined production and consistent quality control across the U.S., Asia, and Europe.
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