Automatic Bake-Out Systems
Main specifications
Fully automatic sequence for bake-out of components
Easy to use, as the system is fully automated
Output report with all details on outgassing/bake-out
Over 300 systems built worldwide (mostly for the semiconductor and analytical industries)
Default bake-out temperature: 150°C
Options
Various sizes available: from 1 liter to 10,000 liter vacuum chambers
Bake-out temperature options: 400°C or even 1200°C ovens
Front-loading or top-loading concept

High-Vacuum Bake-Out Systems for Applied Materials
Applied Materials required a reliable solution for baking out (ultra) high-vacuum components at 400°C while meeting the stringent requirements of the semiconductor industry. We developed multiple NGB systems that combine low outgassing levels with high temperatures, all featuring a fully automated process. The systems are controlled by highly user-friendly software, which was a key requirement from Applied Materials. With these advanced solutions, Applied Materials can ensure the quality and performance of its high-vacuum components while adhering to the strict industry standards.
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