Automatic Bake-Out Systems

The standard system for bake-out measurement of outgassing in components and complete assemblies.

Main specifications

  • Fully automatic sequence for bake-out of components

  • Easy to use, as the system is fully automated

  • Output report with all details on outgassing/bake-out

  • Over 300 systems built worldwide (mostly for the semiconductor and analytical industries)

  • Default bake-out temperature: 150°C

Options

  • Various sizes available: from 1 liter to 10,000 liter vacuum chambers

  • Bake-out temperature options: 400°C or even 1200°C ovens

  • Front-loading or top-loading concept

High-Vacuum Bake-Out Systems for Applied Materials

Applied Materials required a reliable solution for baking out (ultra) high-vacuum components at 400°C while meeting the stringent requirements of the semiconductor industry. We developed multiple NGB systems that combine low outgassing levels with high temperatures, all featuring a fully automated process. The systems are controlled by highly user-friendly software, which was a key requirement from Applied Materials. With these advanced solutions, Applied Materials can ensure the quality and performance of its high-vacuum components while adhering to the strict industry standards.

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